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Substrate Income Inspection
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Epitaxial Process -
Flow Capacity Control,
Temperature Control, Pressure Control...
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Wafer Test - CV, PL,
EL, X-ray Test
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Wafer
Process
1. In Process, Check by Oneself
2. Test Before Facet Coating
3. Test After Facet Coating
4. Sorting Chip
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Package Process
1. In Process Check, SPC.
2. Test After Chip on Submount
3. Test After Burn-in
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